SPM
SPARE PARTS FOR SEMICONDUCTOR, THIN FILM, PV AND PHOTONICS INDUSTRIES

KEY BENEFITS OF SPM PRODUCTS
  • New and Replacement Heaters
  • Electrostatic Chuck replacement and refurbishment
  • Sputtering Targets For All Your Coating Applications
  • Optical Parts for steppers
  • High Purity Silicon for IR applications
  • Filaments and Crystals
  • Anodised Metal Parts
  • Reticle Cases

SPM are a European supplier of consumable spare parts for the Semiconductor, Thin Film, PV and Photonics Industries.

Founded in 1997, SPM started life supplying Silicon and sputtering targets to customers worldwide. From that time SPM have grown their range of products significantly and now offer products for a range of different industries.

SEMICONDUCTOR
Ceramic and Aluminium Heaters for all major OEMs
ESC refurbishment
Optical parts for steppers
Reflector refurbishment
Anodised Metal parts
Sputtering targets
Reticle cases

Thin Film/ PV
Sputtering targets for all applications
(Silicon, ITO, High Index materials, Alloys and more)
Filaments and Quartz Monitor crystals
Target Bonding service

Photonics
High Purity IR Silicon in Plano Plano or generated shapes up to 450mm diameter

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